Pay in 4 interest-free payments of $48.25 Learn more
Ships within 48 hours · Estimated delivery Jul 27 - Aug 1
2-0211 (Reapproved 0623) — Specification for Round 3 inch (76
SEMI E84-1109 (technical revision)
SEMI E123-0303 (first published - replaces SEMI E30
The purpose of this Document is to provide a standardized methodology and procedure for measuring the particle contribution performance of a gas delivery system in terms of number of particles added to gas flowing through the system
org June 2003
E02200 - SEMI E22 - Specification for Cluster Tool Module Interface: Transport Module End Effector Exclusion Volume StdPbc-0918 2-0211 (Reapproved 0623) — SpecificationNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. The purpose of this Specification is to provide sufficient detail to allow the transport module end effector to move wafers to and from process and cassette modules in a cluster tool without mechanical interference. This